The adoption of FLATVEYOR achieves high cleanliness and significantly reduces assembly work.
Cable Carrier (CABLEVEYOR)
overview
In order to further improve the cleanliness of areas where the TKR type was previously used, FLATVEYOR, a self-standing flat cable system, has been adopted. This not only improves the cleanliness level, but also eliminates the need to insert cables and tubes into Cable Carrier (CABLEVEYOR), which has led to a significant reduction in the number of man-hours required for assembly into the equipment.
Problem
Dust prevention is a major issue in semiconductor manufacturing equipment. Conventionally, the TKR type, which is the most clean open type in Plastic Series, was used, but because it operates above the wafer, further reduction in dust generation was required.
Adopted products
Cable Carrier (CABLEVEYOR) FLATVEYOR
This is a self-standing flat cable system that can handle Long travel length that cannot be achieved with flat cables.
Achieving ISO Class 1 cleanliness contributes to improved yield.
We do not use any specific hazardous substances exceeding the thresholds restricted by the European RoHS II Directive. (Excluding customer-supplied cables and tubes.)
Benefits of adopting the product
Initially, we considered using the FLATVEYOR ZP specification, which would enable improved cleanliness and would allow users to insert cables and tubes like the TKR type, but we decided to use FLATVEYOR because we also had plans to mass-produce the device.As the model is delivered as a set with the cables and tubes already welded, we simply had to attach it to the device as is, which not only improved cleanliness but also significantly reduced the amount of work required to assemble it into the device.
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