Space-saving equipment achieved by customizing the lifter's lifting jig shape
Lift Master
overview
When performing maintenance on the heater that heats the wafer, it is necessary to raise it from inside the chamber and bring it to the other side.
We have adopted Lift Master as a mechanism that allows lifting, lowering, and rotation operations while taking up as little space as possible.
Problem
We needed a mechanism that could perform two actions: lifting and rotating, in a limited space.
Adopted products
Lift Master
Lift Master is a cantilever lifter that can be plug and play type and tolerates overhang and lateral loads.
No assembly is required; simply install it on the floor, attach the arm, and connect the power to the motor to use it immediately.
The screw shaft and guide are compactly built into a highly rigid frame to support cantilever loads (overhanging loads).
Benefits of adopting the product
As originally hoped, we were able to create a lifting mechanism without requiring any additional space.
There was also a proposal for a special model in which Lift Master base itself could be rotated, but in the end, the standard catalog Lift Master model was adopted, with the jig attached to Lift Master being designed to be rotatable.
The simple structure, which combines Ball screw, guide, and frame, made selection and installation easy.
Tsubaki will do its utmost to support you in solving any problems you may have.
Please feel free to contact us with any concerns you may have.
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