For the semiconductor industry
Tsubaki products
We can propose products for semiconductor manufacturing equipment that require low dust generation and high precision.
Transport
Robotic transport
Wafer Transfer Robot
Recruitment purpose
Driving robot arms and running robots
High accuracy in stopping position, high speed, and low dust generation are required during travel.
Cable Carrier (CABLEVEYOR)
We offer low-dust products suited to your usage environment.
TKP Series MW specifications
This high-performance Cable Carrier (CABLEVEYOR) uses a "special highly slidable material" to improve cable and tube protection and reduce dust generation.
POINT
Low dust generation, highly versatile
TKR Series
Tsubaki's unique bending mechanism achieves low dust generation, low noise, and low vibration.
POINT
- Cleanliness ISO Class 3 (in-house test results)
- Quiet
Power-Lock Coupling
Stainless steel specifications
Electroless nickel plating specifications
A rich lineup and reliable quality meets environmental resistance needs
POINT
Clean, corrosion-resistant, and highly versatile
Synchronous Belts
Ultra PX Belt HC Type
Ultra PX Belt HY Type
High precision and strength transmission belt
This transmission belt is designed for even higher precision and strength, contributing to more compact equipment. It minimizes the scattering of Wear debris, ensuring clean operation. HY Type which offers even higher strength and rigidity, is also available.
POINT
High precision, high speed
Pulley
Lock Belt Sprockets plated
This is Belt Sprockets with an integrated keyless fastener. The surface treatment of each part improves corrosion resistance and enables dry fastening without the need for lubrication.
POINT
Zero backlash in fastening, easy to arrange
Clean Transfer System
Ceiling transport system
AUTRAN VANGUARD
Achieve clean transport in ceiling space
Heavy load transport (max. 200 kg), zero dust generation from the current collector (non-contact power supply), direct transport to manufacturing equipment. Equipped with a clean unit, it can maintain a high level of cleanliness for the workpiece.
POINT
Zero dust generation from the current collector, heavy load transport (up to 200 kg)
Lifting
FOUP TRANSPORT BY AMR
Using Zip Chain Actuator in the lifting mechanisms on AGVs and AMRs contributes to lowering the floor.
POINT
Space saving, low floor
Zip Chain Series
Zip Chain Actuator
A versatile linear actuator that can be installed even in a small space
It is space-saving, supports high-speed and high-frequency operation, and uses significantly less power than hydraulic or pneumatic cylinders. It is capable of high-precision multi-point stopping and can be installed in any direction.
AMR Lift
Hydraulic lifter, wire type
The stopping accuracy is low, causing a step between the lifter and the floor
Pole screw type
Difficult to achieve Long travel length
Zip Master has the solution!
POINT
- High precision: Minimizes steps when transferring
- High speed: Reduces takt time
- High lift: Up to 4m
Zip Chain Series
Zip Master
A cantilever lifter that can be raised and lowered at high speed by simply placing it on Zip Chain
It has a "plug and play type" design that can be used simply by placing it, and its high speed, high frequency and high lift make it suitable for a variety of uses.
Lid opening and closing mechanism
Lift Master is used to raise and lower the equipment lid. We can also propose a structure that allows the arm holding the lid to be rotated manually.
POINT
Easy to install and operate, clean and oil-free
Cantilever Lifter
Lift Master
Cantilever lifter using Ball screw / Trapezoidal Screw that enable high-precision multi-stage positioning
The "plug and play type" design allows for flexible layout of the production line and is easy to handle. The electrification improves the working environment and contributes to energy savings.
Clean room compatible
We can reduce dust generation from each part.
- Special surface treatment (Ball screw screw guide)
- Stainless steel cover
- Clean grease application (Ball screw /guide)
- Baked paint
Vertical circular transport of hoops
Lambda Chain are used in the lifting section of the transport device between the hoop levels. As no external oil supply is required, this reduces the amount of equipment maintenance work and contributes to the realization of a clean environment by suppressing oil splatter.
POINT
- Reduced maintenance work
- Maintaining a clean environment
Lube-free Drive chain
Lambda Chain
Lube-free chain using special oil-impregnated bush
It uses special oil-impregnated bush with self-lubricating properties, allowing for long-life use Lube-free.
Rotation/Transmission
Wafer Polishing Equipment
There are many examples of the use of Troi Drive with minimal rotational fluctuations for rotating the surface plate. In addition, drive belts and pulleys, and reducers for driving brushes are also used.
Recruitment points
High transmission capacity
Compact
Rotation irregularity is small
Inspection equipment reversal mechanism
Troi Drive is used for the prober's reversal mechanism.
Furthermore, Cable Carrier (CABLEVEYOR), belts and pulleys are also used in the moving parts of the wafer stage.
Recruitment points
High strength, lightweight and compact
Self-locking and quiet
Reducers
Troi Drive
High-performance worm reducer
High transmission capacity, thin and compact
Even with a limited ground contact area, it offers a higher transmission capacity than general-purpose worm reducers made by other companies.
low vibration
Worm gears, which transmit force through sliding contact, have lower vibrations than other reducers that use helical bevel gears, which transmit force through rolling contact, improving the finish of the final product.
Small angular transmission error (uneven rotation)
The angular transmission error is approximately 1/10 compared to reduction mechanisms such as helical bevels, resulting in smoother rotation and improved finishes for the final product.
Small Gear Motor
This is a compact, easy-to-use, and highly efficient reducer. We can propose the optimal motor, shaft arrangement (parallel shaft/ right-angle shaft), and output shaft shape (solid/hollow) for your application.
Zip Chain Series
Zip Chain Actuator
Medium and large sizes
POINT
Thrust MAX38.2kN
Stroke MAX 5000mm
Speed MAX1000mm/sec
Can be installed even in a small space,
Versatile linear actuator
This is a Tsubaki-original linear actuator that combines high-speed and high-frequency operation with excellent stopping precision, controllability, and compactness.
Synchronous Belts and pulleys
Ideal for applications requiring accurate positioning and high synchronization
Tsubaki Synchronous Belts are capable of high-frequency, high-speed operation and have a long lifespan.
Please use it in combination with the genuine pulley to fully utilize the high-strength, high-tensile capabilities of PX Belt.
DCBL Hypoid Motor
This is a reliable motor that combines the benefits of inverter drive and servo motors.
The built-in temperature sensor protects the motor from burning out.
TERUS series
It is also possible to combine a gear motor with a worm reducer. This is a highly functional gear motor that combines the high strength of a worm gear with the high efficiency of a gear motor. This allows for more compact equipment and a reduced number of parts.
Learn more about the TERUS series
For product inquiries, please contact us here
Support, guidance and protection
Do you have any of these issues with cable support guides?
From Cable Carrier (CABLEVEYOR) (including equivalents)
- Want to reduce product defects caused by adhesion Wear debris
- Want to reduce installation space
- Want to improve the protection of cables and tubes?
From flat cables and tubes
- I want to reduce the deflection of cables and tubes.
- I want to reduce the jump
CLEANVEYOR and FLATVEYOR solve a variety of problems.
Moving the stage
FLATVEYOR is used to support and guide the cables in the moving parts of the stage.
Recruitment device
Exposure machines, bonders, mounters, etc.
Recruitment points
Low dust generation, low vibration, and wire breakage prevention
Transferring wafer cassettes
It is used to support and guide cables when transferring between chemical tanks.
Support members allow for Long travel length.
Recruitment device
Cleaning equipment
Recruitment points
Low dust generation, Long travel length
CLEANVEYOR
Cleanliness ISO Class 1
This is the lowest dust-emitting Tsubaki cable and hose support and guide device.
It achieves ISO Class 1 cleanliness and is ideal for use in clean rooms.
It has low noise of less than 36 dB(A) and a long life with over 10 million flex cycles*. *Results of in-house testing.
Low dust generation
Storing cables, tubes, and support members inside the pod prevents Wear debris from scattering.
It is also effective in preventing the risk of cable breakage due to sliding or interference between cables.
Reduced installation work
Dedicated cables and tubes are included and clamps are attached for smooth installation on equipment.
Multi-stage structure support
Up to 6 stacks are possible. *Results of in-house testing.
More about CLEANVEYOR
For product inquiries, please contact us here
FLATVEYOR
Cleanliness ISO Class 2
This is Tsubaki's unique freestanding flat cable system.
It has a built-in support member with a unique mechanism, allowing it to be used with Long travel length. It is supplied with dedicated cables and tubes depending on the conditions of use.
Low dust generation
This contributes to improving product yield.
Long travel length
It can handle a maximum stroke of 2.8m.
(ZP specification: maximum 1.8m)
Flat cable (other manufacturer)
FLATVEYOR (made by Tsubaki)
Measures to prevent wire breakage
Up to 6 stacks are possible. *Results of in-house testing.
Bounce suppression
Prevents interference between the device and the cables.
Flat cable (other manufacturer)
FLATVEYOR (made by Tsubaki)
More information about FLATVEYOR
For product inquiries, please contact us here
FLATVEYOR ZP type
Improved handling
- Cables and tubes can be easily inserted and removed, and partial replacement is possible. Tsubaki's unique open-close tube is used, which is flexible, durable, and has good sliding properties.
- Achieves cleanliness equivalent to ISO Class 2 (based on our in-house testing results).
Cable Carrier (CABLEVEYOR) Plastic Series
PVDF specifications
For vacuum applications
The use of special fluororesin is effective in preventing outgassing in vacuum environments.
It also has excellent chemical resistance.
More information about the PVDF specification of Cable Carrier (CABLEVEYOR) Plastic Series
For product inquiries, please contact us here