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Substantial improvement in stopping accuracy and cleanliness of semiconductor conveyors by replacing with high-strength, high-rigidity belts

Ultra PX Belt HY Type

Problem
工数削減、摩耗粉・発塵
Industry
LCD, semiconductor, electronic equipment, communications
Purpose
Transmit power
product
Synchronous Belts / Belt Sprockets

overview

In conveying equipment used in semiconductor inspection processes, conventional Synchronous Belts from other companies lacked sufficient rigidity, resulting in inadequate stopping accuracy and causing discrepancies in workpiece transfer and processing position.

Furthermore, dust generated by wear and tear could negatively impact the clean environment and potentially impair inspection accuracy.

Therefore, by adopting the HY Type Synchronous Belts, which offers high strength and rigidity, we significantly improved stopping accuracy and achieved process stability.


Problem

With conventional Synchronous Belts from other manufacturers, the accuracy of the stopping position was insufficient, which sometimes resulted in misalignment during workpiece transfer and machining.

Furthermore, dust generated by the wear of Synchronous Belts manufactured by other companies posed a risk of compromising the clean environment crucial for semiconductor manufacturing, potentially negatively impacting the items being inspected.


Adopted products

Ultra PX Belt HY Type

High power transmission capacity is achieved by using a hybrid core wire made of highly rigid carbon and glass fiber that has been specially treated.

It is possible to make the device more compact and reduce its weight.

By employing a hybrid core wire, we have achieved reduced load elongation, enabling high-speed and high-load power transmission.

Furthermore, the significant reduction in decay time and decrease in maximum amplitude enable faster operation of the device.


Benefits of adopting the product

Tsubaki's HY Type Synchronous Belts achieve ultra-high rigidity and strength by employing a hybrid core made of specially treated carbon and glass fiber. This reduces workpiece misalignment, improving the stability of the transfer and processing stages.

Furthermore, the adoption of low-friction tooth fabric and the shock-absorbing effect of this hybrid core wire ensure clean operation.


Tsubaki will do its utmost to support you in solving any problems you may have.

Please feel free to contact us with any concerns you may have.

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Solution Case Study in the same industry


Solution Case Study for the same problem


Case studies of related industries and facilities

LCD, semiconductor, electronic equipment, communications