Protecting cleanroom cables, reducing dust generation and improving yield
Cable Carrier (CABLEVEYOR)
overview
For semiconductor and FPD manufacturing and inspection equipment used in clean rooms, it is important to suppress dust generation that can lead to workpiece defects.
CLEANVEYOR 's low dust generation, ISO clean class 1 rating, cleanly supports and guides Flexible cable above the workpiece, contributing to improved yield.
Problem
When the moving parts of the cable protection device are located above the workpiece in semiconductor and FPD manufacturing and inspection equipment, dust can be generated, causing problems with the workpiece.
Adopted products
Cable Carrier (CABLEVEYOR) CLEANVEYOR
This is the lowest dust-generating cable system among Tsubaki Cable Carrier (CABLEVEYOR).
It achieves ISO Class 1 cleanliness and is ideal for use in clean rooms.
36ｄB（A）以下の低騒音と屈曲回数1000万回以上の長寿命です。（当社テスト結果より）
We do not use any specific hazardous substances exceeding the thresholds restricted by the European RoHS II Directive. (Excluding customer-supplied cables and tubes.)
Benefits of adopting the product
CLEANVEYOR, which is integrated into a pod made of fluororesin material, has achieved low dust generation, leading to improved yields.
In addition, it has acquired ISO Clean Class 1 certification, which has contributed to improving the reliability of the equipment in clean rooms.
Tsubaki will do its utmost to support you in solving any problems you may have.
Please feel free to contact us with any concerns you may have.
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