Prevents flat cables from jumping up during high-speed, Long travel length operation
Cable Carrier (CABLEVEYOR)
overview
The high speed and Long travel length of the equipment caused flat cables to bounce up. By adopting CLEANVEYOR, which can store and protect cables and tubes in an e-PTFE pod, we were able to prevent flat cables from bouncing up and create an even cleaner environment.
Problem
半導体製造装置の処理室内で従来から使用していたフラットケーブルでは、装置の高速化・長ストローク化により跳ね上がる事象が発生することで、フラットケーブルが装置内の天井とぶつかるリスクがありました。これが発塵や断線に繋がるおそれがあるため、安定した動作を実現できるケーブルシステムが必要でした。またウエハの処理には微細な発塵でも歩留まり悪化の恐れがあるため、最高クラスのクリーンクラス実現が求められていました。
Adopted products
ケーブルベヤ クリーンベヤ
This is the lowest dust-generating cable system among Tsubaki Cable Carrier (CABLEVEYOR).
It achieves ISO Class 1 cleanliness and is ideal for use in clean rooms.
It has low noise of less than 36dB(A) and a long life of more than 10 million flexes.
We do not use any specific hazardous substances exceeding the thresholds restricted by the European RoHS II Directive. (Excluding customer-supplied cables and tubes.)
Benefits of adopting the product
採用したクリーンベヤは内蔵するサポートメンバが走行時のケーブル挙動を安定化するガイドの役割を果たすため、高速・長ストロークでもスムーズで静粛な動作が実現可能。e-PTFE製ポッドへのケーブル内包と自立によりつばきのケーブルシステムで最もクリーンなクリーンベヤは、処理室内の清浄度を維持することもでき、ウエハの上部で使用する用途においても安心して使用することができています。
Tsubaki will do its utmost to support you in solving any problems you may have.
Please feel free to contact us with any concerns you may have.
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