Achieves Long travel length, lower dust generation, and reduced vibrations in wafer transport robot equipment
Cable Carrier (CABLEVEYOR)
overview
The general-purpose TKP Series Cable Carrier (CABLEVEYOR) was previously used to protect the cables and tubes in the traverse section of the robot, which travel distance the transport distance within the equipment was extended, a model with lower dust generation, quietness, and less vibration was adopted, resulting in improved product yield and stable equipment operation.
Problem
With the increasing size of wafers and the adoption of PLP (Panel Level Package), the traverse distance of transport robots tends to increase. In conventional transport equipment, Cable Carrier (CABLEVEYOR) was installed below the wafers and FOUPs, so a general-purpose TKP model was used. However, in order to improve product yield, it was necessary to increase the overall cleanliness of the equipment, and a cable system with excellent low dust generation, low vibration, and quietness was required.
Adopted products
Cable Carrier (CABLEVEYOR) TKR type
ピンとピン穴を持たないリンクレス構造とすることで清浄度ISOクラス1を実現した、プラシリーズオープン形の中でもっとも清浄度が高いシリーズです。
汎用的なTKP形と比較して低騒音、低発塵により環境負荷低減に貢献します。
ドライ環境仕様（低湿度環境に対応）など特殊仕様の対応が可能です。
最大ストローク5.94mに対応するEX仕様もございます。
欧州RoHSⅡ指令で制限されている閾値以上の特定有害物質は使用していません。（収納するケーブル・チューブを除く）
Benefits of adopting the product
By changing from the general-purpose TKP Series to the TKR Series, which has a linkless structure with no pins or pin holes, we were able to improve product yield by preventing wear debris from Cable Carrier (CABLEVEYOR) body. In addition, the high quietness and low vibration have enabled stable equipment operation and an improved manufacturing environment.
The structural design and materials of the bending section have been optimized to achieve Long travel length due to rigidity while maintaining flexibility in bending. With the release of the TKR28H52-EX model, it is now possible to achieve a high clean class even in equipment with long transfer distances where the TKR type could not be used until now.
Tsubaki will do its utmost to support you in solving any problems you may have.
Please feel free to contact us with any concerns you may have.
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