Achieves Long travel length, lower dust generation, and reduced vibrations in wafer transport robot equipment
Cable Carrier (CABLEVEYOR)
overview
The general-purpose TKP Series Cable Carrier (CABLEVEYOR) was previously used to protect the cables and tubes in the traverse section of the robot, which travel distance the transport distance within the equipment was extended, a model with lower dust generation, quietness, and less vibration was adopted, resulting in improved product yield and stable equipment operation.
Problem
As wafer diameters increase and PLP (Panel Level Package) becomes more common, the traverse distances of transport robots tend to become longer. In conventional transport equipment, Cable Carrier (CABLEVEYOR) were installed below the wafers or FOUPs, so general-purpose TKP Series were used, but to improve product yield, it became necessary to increase the cleanliness of the entire equipment, and a cable system with low dust generation, low vibration, and quietness was required.
Adopted products
Cable Carrier (CABLEVEYOR) TKR type
By adopting the TKR type, which has a linkless structure without pins or pinholes, it achieves ISO Class 1 cleanliness, making it the cleanest series in Plastic Series open type. Compared to the general-purpose TKP type, it contributes to reducing environmental impact through lower noise and lower dust generation.
We can accommodate special specifications, such as those for dry environments (suitable for low humidity environments). We do not use any specific hazardous substances exceeding the thresholds restricted by the European RoHS II Directive (excluding the cables and tubes housed within).
Benefits of adopting the product
By changing from the general-purpose TKP Series to the TKR Series, which has a linkless structure with no pins or pin holes, we were able to improve product yield by preventing wear debris from Cable Carrier (CABLEVEYOR) body. In addition, the high quietness and low vibration have enabled stable equipment operation and an improved manufacturing environment.
The structural design and materials of the bending section have been optimized to achieve Long travel length due to rigidity while maintaining flexibility in bending. With the release of the TKR28H52-EX model, it is now possible to achieve a high clean class even in equipment with long transfer distances where the TKR type could not be used until now.
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