Reduced dust generation and improved safety for collaborative robot traversal sections in clean rooms
FLATVEYOR ZP specifications
overview
To reduce dust generation from Cable Carrier (CABLEVEYOR) and cables/tubes of general-purpose models, which has been an issue in wafer manufacturing equipment, the FLATVEYOR ZP specification, which stores cables/tubes in an openable PVC tube, has been adopted. This not only addresses the dust generation issue of previous models, but also improves the manufacturing environment and product yield.
Problem
In semiconductor manufacturing, in order to improve product yield, it is important to suppress dust generation from sliding parts in manufacturing equipment inside clean rooms.
With the general-purpose Cable Carrier (CABLEVEYOR) used in conventional equipment, there have been cases where dust generated from Cable Carrier (CABLEVEYOR) itself and the cables and tubes inside has caused problems with foreign matter getting mixed in (contaminating) with products such as wafers.
Adopted products
Cable Carrier (CABLEVEYOR) FLATVEYOR ZP specifications
This is a freestanding flat cable system with Tsubaki's unique opening and closing mechanism that uses PVC tubes that are flexible, durable, and have good sliding properties.
Achieving ISO Class 1 cleanliness contributes to improved yield.
This product does not contain any hazardous substances exceeding the thresholds restricted by the European RoHS II Directive (excluding the cables and tubes it contains).
Benefits of adopting the product
Unlike general-purpose Cable Carrier (CABLEVEYOR), we considered using CLEANVEYOR, which can store cables and tubes in a pod-shaped sheet. However, due to the possibility that the contents of the cables and tubes may change, we decided to use FLATVEYOR ZP specifications, which allow for rewiring on site.
This has resulted in the suppression of dust generation, which is a cause of contamination within the clean room, and has improved product yield.In addition, because FLATVEYOR ZP specification has a flexible PVC tube body, it has also reduced the risk of contact with workers working near the traverse section of the introduced collaborative robot, leading to an improvement in the overall manufacturing environment.
Tsubaki will do its utmost to support you in solving any problems you may have.
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