Reduced dust generation and improved safety for collaborative robot traversal sections in clean rooms
FLATVEYOR ZP specifications
overview
To reduce dust generation from Cable Carrier (CABLEVEYOR) and cables/tubes of general-purpose models, which has been an issue in wafer manufacturing equipment, the FLATVEYOR ZP specification, which stores cables/tubes in an openable PVC tube, has been adopted. This not only addresses the dust generation issue of previous models, but also improves the manufacturing environment and product yield.
Problem
In semiconductor manufacturing, in order to improve product yield, it is important to suppress dust generation from sliding parts in manufacturing equipment inside clean rooms.
With conventional general-purpose Cable Carrier (CABLEVEYOR) used in existing equipment, there were cases where contamination of products such as wafers due to dust generated from Cable Carrier (CABLEVEYOR) body or the cables and tubes inside was a problem.
Adopted products
Cable Carrier (CABLEVEYOR) FLATVEYOR ZP specifications
This is a freestanding flat cable system with Tsubaki's unique opening and closing mechanism that uses PVC tubes that are flexible, durable, and have good sliding properties.
Achieving ISO Class 1 cleanliness contributes to improved yield.
We do not use any specific hazardous substances exceeding the thresholds restricted by the European RoHS II Directive. (Excluding the cables and tubes that are housed inside.)
Benefits of adopting the product
Unlike general-purpose Cable Carrier (CABLEVEYOR), we considered using CLEANVEYOR, which can store cables and tubes in a pod-shaped sheet. However, due to the possibility that the contents of the cables and tubes may change, we decided to use FLATVEYOR ZP specifications, which allow for rewiring on site.
This reduces dust generation, which is a cause of contamination in the cleanroom, and improves product yield. In addition, because FLATVEYOR ZP specification has a flexible PVC tube body, it reduces the risk of contact with workers working near the traversing part of the collaborative robot, leading to an overall improvement in the manufacturing environment.
Tsubaki will do its utmost to support you in solving any problems you may have.
Please feel free to contact us with any concerns you may have.
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