By achieving Long travel length transport while suppressing dust generation in the wafer cleaning system, the workpiece defect rate is improved.
Cable Carrier (CABLEVEYOR) TKR type
overview
In a batch-type fully automated wafer cleaning system, the TKR28H52-EX Cable Carrier (CABLEVEYOR), which supports Long travel length applications, was adopted to accommodate long-distance inter-process transport.
The TKR type generates less dust, which has contributed to improving the rate of workpiece defects caused by dust.
Problem
In batch-type fully automatic cleaning systems, the transport distance increases due to the larger size of the circuit boards, so a general-purpose Cable Carrier (CABLEVEYOR) capable of handling Long travel length was used.
However, with general-purpose Cable Carrier (CABLEVEYOR), dust generated from the sliding parts caused Wear debris to adhere to the product, resulting in defective workpieces.
Adopted products
Cable Carrier (CABLEVEYOR) TKR type
This series achieves ISO Class 1 cleanliness by using a linkless structure that eliminates pins and pinholes, making it the cleanest series in Plastic Series open type.
Compared to the general-purpose TKP model, it contributes to reducing environmental impact through lower noise and dust generation.
We can accommodate special specifications, such as dry environment specifications (suitable for low humidity environments).
We do not use any specific hazardous substances exceeding the thresholds restricted by the European RoHS II Directive. (Excluding the cables and tubes that are housed inside.)
Benefits of adopting the product
The TKR28H52-EX achieves both low dust generation and Long travel length by eliminating sliding wear between the pin and pin hole and employing a highly wear-resistant, high-sliding material.
Therefore, even long inter-process transfers during wafer cleaning can be handled with a single Cable Carrier (CABLEVEYOR), which helps suppress dust generation and contributes to improving the defect rate of workpieces.
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