It is used in the moving parts above the work area, which are extremely sensitive to dust particles, in semiconductor and liquid crystal manufacturing and inspection equipment used in clean rooms.
They are also used on the lower parts of equipment that have problems with dust particles flying up, even in moving parts below the workpiece.

Key points for recruitment

• ・A cable system that incorporates dedicated cables and tubes according to the conditions of use, achieving low dust generation with cleanliness class 1.
• - High durability achieved by bending over 10 million times.
• - Noise level is kept below 38dB(A), contributing to a clean environment.
• - Our unique support members maintain a reliable trajectory and support and guide cables with stable operation.