Achieving low dust generation and space-saving automation at the same time with a lifting device in a clean environment
To automate the opening and closing of the doors of semiconductor lithography equipment, it was necessary to select a space-saving electric actuator that could be installed without changing the equipment layout.
Additionally, since the equipment is located in a clean room, low dust generation was also important.
Therefore, we adopted Zip Chain Actuator which has a low profile and compact design.By using clean grease, we have reduced the risk of dust generation and made it possible to smoothly incorporate it into existing equipment.
| Problem | Industry | Purpose | Product group |
|---|---|---|---|
| Space-saving | LCD, semiconductor, electronic equipment, communications | Move linearly | Linear Actuator |
Problem
There was a need to select a compact electric actuator with a low profile and space-saving design that could be incorporated into the existing equipment without major changes to the layout.
Furthermore, in the clean environment where semiconductor exposure equipment is installed, the risk of dust generation had to be minimized, as the introduction of foreign matter could lead to product defects and reduced yields.
Adopted products
Zip Chain Actuator
The interlocking chain (Zip Chain) is a chain developed exclusively by our company in which two chains interlock like a zipper to form one strong rod that can be "pushed and pulled."
Zip Chain Actuator is a completely new linear actuator that uses this mechanism.
Zip Chain can be stored in a compact case, achieving overwhelming space savings compared to conventional linear actuator.
It is compatible with high-speed, high-frequency operation and uses significantly less power than hydraulic or pneumatic cylinders.
It is possible to stop at multiple points with high precision, and the installation direction is free.
Benefits of adopting the product
By using Zip Chain Actuator, automation was achieved without changing the equipment layout, allowing for speedy automation with minimal design effort.
High-speed operation of 1000 mm/s has contributed to improved productivity and efficiency of on-site work.
In addition, the use of clean grease significantly reduces the risk of dust generation.
Stable operation is now possible even in a clean environment, which helps maintain product quality.
Tsubaki will do its utmost to support you in solving any problems you may have.
Please feel free to contact us with any concerns you may have.
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